Ebara A70W Dry Vacuum Pump Ebara Dry Pump - Please note that this pump has been re-manufactured and a brand new Dry Screw Pump has been inserted to replace the old worn-out multi-stage roots type base dry pump (Lower pumping module as shown in pictures) as originally supplied with the A70W.
The Screw pump is a much better design for semiconductor and other applications as it offers a much shorter gas path for pumping corrosive and/or reactive gasses. Shorter gas path = less residency time of the reactive gasses inside the pump. With less residency time, the potential for reaction of the process gasses inside the pump becomes reduced.
Another significant benefit to this new configuration is the ability to control the operating temperature of the dry pump via a Danfoss cooling valve / regulator.
The original A70 design had one operating temperature. Certain processes are better run with either a hotter or colder dry pump operating temperature to mitigate the potential of process gas reaction inside the pump.
