Model

Basline error

Substrate and mounting

Interpolation error

Measuring length

Accuracy grade

Intervall

LIF 471
LIF 481

± 1 μm
± 3 μm

≤ ± 0.225 μm/ 5 mm

Scale of Zerodur glass ceramic or glass, bonded with PRECIMET adhesive film
 

± 12 nm

70 mm to 1020 mm

Linear scale

LIF 401 R

Measuring standard*

Coefficient of linear expansion

SUPRADUR phase grating on Zerodur glass ceramic or glass; grating period 8 μm

αtherm = (0±0.1) · 10–6 K–1 (Zerodur glass ceramic)

αtherm ? 8 · 10–6 K–1 (glass)

Accuracy grade*

±1 μm (only for Zerodur glass ceramic), ±3 μm

Baseline error

≤ ±0.225 μm/5 mm

Measuring length ML* in mm

70 120 170 220 270 320 370 420 470 520 570 620 670

720 770 820 870 920 970 1020

Reference marks

One at midpoint of measuring length

Mass

0.8 g + 0.08 g/mm measuring length

Scanning head

AK LIF 48

AK LIF 47

Interface

  1 VPP

? TTL