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主要技術(shù)參數(shù) Main technical specification |
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產(chǎn)品名稱 Products Name |
藍(lán)寶石襯底 Sapphire substrates |
材料 Materials |
光學(xué)級(jí)藍(lán)寶石 optical sapphire(Al2O3) |
直徑范圍 Diameter Range |
2~6(inch) |
直徑公差 Diameter Tolerance (mm) |
±0.02 |
厚度范圍 Thickness Range(mm) |
0.1~1.00 |
厚度公差 Thickness Tolerance (mm) |
±0.02 |
通光孔徑 Clear Aperture |
80%~99% |
表面精度 Surface Accuracy(@632.8nm) |
λ~λ/20 per 25mm |
表面粗糙度 Surface Roughness |
0.1μm per Inch |
表面質(zhì)量 Surface Quality |
80/50,60/40,40/20,20/10,10/5 |
平行度 Parallelism (arcminutes) |
≤3.5 |
軸向 Orientation of Axis |
根據(jù)客戶要求 According to customer requirements |
鍍膜 Coating |
根據(jù)客戶要求 According to customer requirements |